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INNOVECTIS Gesellschaft für Innovations-Dienstleistungen mbH
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Dr. Martin Raditsch

12.04.2017 - TA01232
Low frequency inductively coupled plasma generation

Frankfurt scientists have designed an inductively coupled plasma generator with an operating frequency of only 29 kHz. The emitted light spectra had a high UV-component and electron densities of more than 1015 cm-3 were achieved during a discharge sequence.

Further information: PDF [129 KB]
Development status: Prototype
Author: Dr. Otmar Schöller